Title:
SAMPLE HOLDER AND CHARGED PARTICLE BEAM DEVICE INCLUDING THE SAME
Document Type and Number:
Japanese Patent JP2015026552
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a sample holder which uses a biomimetic suction pad as a sample holding member, and to provide a charged particle beam device.SOLUTION: A sample holder holds a sample (201) and includes multiple support members (301) which support the sample. In the sample holder, a biomimetic suction pad (303) is provided at each support member (301) so that the biomimetic suction pad (303) is positioned between the support member (301) and the sample (201). In order to achieve the above object, the sample holder and a charged particle beam device including the sample holder are described.
Inventors:
NISHIHARA MAKOTO
SUGANO SEIICHIRO
SUGANO SEIICHIRO
Application Number:
JP2013156255A
Publication Date:
February 05, 2015
Filing Date:
July 29, 2013
Export Citation:
Assignee:
HITACHI HIGH TECH CORP
International Classes:
H01J37/20; H01J37/28
Attorney, Agent or Firm:
Manabu Inoue
Yuji Toda
Shigemi Iwasaki
Yuji Toda
Shigemi Iwasaki
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