To provide a sample holder 1 for an electron microscope which enables electrochemical behavior of ions (atoms) to be observed by an electron microscope.
A sample holder 1 for an electron microscope comprises: a container 6 which transmits an electron beam and encloses a fluid therein; two electrodes 4, 5 introduced into the container 6; capacitors C1 to C4 which are composed of a dielectric film 9a provided at the container 6 and connect the electrodes 4 and 5 with each other. The container 6 comprises: a bottom film 7 which transmits the electron beam; a loop shaped side wall 9 provided on the bottom film 7; and a lid film 8 which faces the bottom film 7 so as to sandwich the side wall 9 with the bottom film 7 and transmits the electron beam. The electrodes 4 and 5 are introduced into the container 6 from a slit 9c of the side wall 9. The dielectric film 9a is provided on a surface layer of the side wall 9, and a conductive material 9b is provided in the side wall 9. The dielectric film 9a contacts with the electrodes 4 and 5 at the slit 9c. The conductive material 9b is a metal and the dielectric film 9a is an oxidative product of the metal.
HIRANO TATSUMI
TERADA SHOHEI
KOSHIGOE YUKA
Etsuo Tada