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Title:
SAMPLE HOLDER AND SAMPLE HOLDING UNIT
Document Type and Number:
Japanese Patent JP3472058
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To enable any change in mutually approached parts of respective samples to be observed in the case when mutually opposing parts of two samples are allowed to approach to each other or separate from each other by applying an operational voltage to a piezo-unit of electron microscope so as to make position adjustment of the first sample in three axial directions including a holder shaft.
SOLUTION: The first sample holding member 46 supported on the tip end part of a piezo-unit 43 holds the first sample S1. Holder inside moving members 33 to 42 and the second sample holding member 51 provided on the other inside end part of a holder outer cylinder 11 holds the second sample S2 at a position opposing to the first sample S1. A sample position precise adjusting device (43...) applies an operational voltage to the piezo-unit 43, so as to make positional adjustment of the first sample S1 in three axial directions including a holder shaft so as to bring the first sample S1 in contact with the second sample S2. When the first sample S1 is brought very closely to second sample S2 at a level of inter-atom distance, an inter-atom attractive force works between both samples. In this case, the state of atoms of both samples can be observed.


Inventors:
Tokushi Kizuka
Nobuo Tanaka
Mikio Naruse
Shunji Deguchi
Application Number:
JP899097A
Publication Date:
December 02, 2003
Filing Date:
January 21, 1997
Export Citation:
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Assignee:
JEOL Ltd.
International Classes:
H01J37/20; (IPC1-7): H01J37/20
Domestic Patent References:
JP8106873A
JP62119847A
JP4206333A
JP1316602A
JP180755U
Attorney, Agent or Firm:
Takahide Tanaka (1 outside)