Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
SAMPLE HOLDER FOR SECONDARY ION MASS SPECTROMETER
Document Type and Number:
Japanese Patent JPH04106851
Kind Code:
A
Abstract:

PURPOSE: To obtain stable ion intensity for a long duration by putting a beam on the rear side of a holder plate of a sample holder to reinforce the holder plate and suppress the strain of the holder plate.

CONSTITUTION: A beam 4 for reinforcement is put in the rear side of a sample holder plate 2. That is, a metal plate 2 made of Ta is put in a metal frame 1 made of a stainless steel and windows 3 are opened and a stick 4 made of a stainless steel is so arranged in the way like a lattice as to cross the peripheris of the windows 3 in the rear side and welded to the sample holder plate 2 to give a sample holder. As a result, the strain is suppressed to the minimum level. Consequently, the measured ion intensity does not become uneven and stable measurement is carried out for a long duration.


Inventors:
YOSHIDA SHIGEKI
YOKOI HIDETO
TAKASE HIROMITSU
Application Number:
JP22117990A
Publication Date:
April 08, 1992
Filing Date:
August 24, 1990
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
CANON KK
International Classes:
G01N27/62; G01N23/22; H01J37/20; H01J37/252; (IPC1-7): G01N27/62; H01J37/20; H01J37/252
Attorney, Agent or Firm:
Yoshida Katsuhiro