PURPOSE: To obtain a sample-stage supporting apparatus which has the simple structure, can be used conveniently and corresponds to IMA.
CONSTITUTION: Sample stages 2 are mounted on many screw holes 1a which are provided on a sample conveying stage 1 through screw mechanisms so that the stages 2 can be moved up and down. A sample supporting piece 3 which can keep the free state with respect to the rotation of each sample stage 2 is provided at the upper end of the sample stage 2. A sample 5 is attached on the sample stage 2 through the sample supporting piece 3. The sample 5 on the sample stage 2 is set in a space at the upper surface of the sample conveying stage 1 so that the sample is analyzed. A cap 4 determines the position of the height of the sample 5 in the setting space. The sample 5 is fixed to and held with the sample supporting piece 3 by welding through low-melting- point metal such as In and Ga. Therefore, the freedom of the setting space of the sample is increased, the number of the samples to be mounted is increased, the samples having the various kinds and sizes can be mounted and the rubbing of the sample with the cap is eliminated. The electric contact between the sample and the sample supporting piece can be obtained.
TAMURA HIFUMI
SUMIYA HIROYUKI
INAMURA AKIYOSHI
HITACHI INSTRUMENTS ENG