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Patent Searching and Data


Title:
SAMPLE HOLDER
Document Type and Number:
Japanese Patent JPH06150863
Kind Code:
A
Abstract:

PURPOSE: To observe continuously a specific area of a sample surface without moving the sample surface in a vertical direction even if heating and cooling of a sample is repeated by forming a tip part of a holder support part in a double structure of an outer cylinder and an inner cylinder.

CONSTITUTION: In a molybdenum holder support part 11, a tip part of an outer cylinder 11a is bent inside, and an inner cylinder 11b is formed, and the tip part is formed in a double structure of the cylinder 11a and the cylinder 11b. A molybdenum holder main body 12 has an inserting part 12b extending in a cylindrical shape from the peripheral edge of a flat body 12a, and the inserting part 12b is inserted in the cylinder 11b of the support part 11, and a pin 13 fixed to the inserting part 12b is inserted in a pin hole 12c, and the main body 12 is installed on the support part 11. A heater 15 is arranged in a space surrounded with the inner cylinder 11b of the support part 11 in the rear of the flat body 12a of the main body 12.


Inventors:
SHIMIZU SABURO
YUI KAZUO
FUWA KO
YANAGIDA HIROSHI
YAMAMURO KAZUHIRO
SHIGETOMI JUNICHI
Application Number:
JP12571892A
Publication Date:
May 31, 1994
Filing Date:
April 17, 1992
Export Citation:
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Assignee:
ULVAC CORP
JAPAN RES DEV CORP
International Classes:
H01J37/20; H01J37/295; (IPC1-7): H01J37/20; H01J37/295
Attorney, Agent or Firm:
Akira Miyazaki