Title:
Sample holding fixture
Document Type and Number:
Japanese Patent JP6122323
Kind Code:
B2
Inventors:
Yoshihiro Ashihara
Application Number:
JP2013063889A
Publication Date:
April 26, 2017
Filing Date:
March 26, 2013
Export Citation:
Assignee:
Kyocera Corporation
International Classes:
H01L21/683
Domestic Patent References:
| JP2004158751A | ||||
| JP2011181863A | ||||
| JP11026565A | ||||
| JP2003158172A | ||||
| JP2009239097A | ||||
| JP2007012795A | ||||
| JP2007227789A | ||||
| JP2010272873A |
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