Title:
Sample inspection method and system using thermography
Document Type and Number:
Japanese Patent JP6301951
Kind Code:
B2
Abstract:
The invention provides a method for a non-destructive, non-contacting and image forming examination of a sample by means of heat flow thermography. The method comprises exciting the sample at least twice independently from each other by means of the heat pulses from the excitation source; taking a first thermal image of the surface of the sample at a first time distance t 1 from a first triggering of the heat pulse which first time distance t 1 is characteristic for gradients in heat flow velocity in a first depth below the surface of the sample; taking a second thermal image of the surface of the sample at a second time distance t 2 from a second triggering of the heat pulse which second time distance t 2 is characteristic for gradients in heat flow velocity in a second depth below the first depth; and taking any thermal images of the surface of the sample at a further time distances t n from any subsequent triggering of the heat pulse which further time distances t n are characteristic for gradients in heat flow velocity in further depths lying deeper as the second depth; and extracting from the thermal images an indication of the presence of any gradients of heat flow velocity at the respective depth distances from a surface of the sample. The system is configured to carry out the above method.
Inventors:
Heisenstein, Hans
Stolz, Peter
Mainhart, Raiko
Stolz, Peter
Mainhart, Raiko
Application Number:
JP2015546914A
Publication Date:
March 28, 2018
Filing Date:
November 13, 2013
Export Citation:
Assignee:
THERMOSENSORIK GMBH
International Classes:
G01N25/72
Domestic Patent References:
| JP2015500476A | ||||
| JP64046638A | ||||
| JP2010531984A | ||||
| JP2006505764A |
Foreign References:
| US20050056786 | ||||
| US4792683 | ||||
| US20050008215 |
Attorney, Agent or Firm:
Iseki Katsumori
Shuhei Kaneko
Shuhei Kaneko