Title:
SAMPLE OBSERVATION DEVICE
Document Type and Number:
Japanese Patent JP2015176866
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a sample observation device with an electron microscope, capable of observing and analyzing a sample under atmospheric pressure.SOLUTION: A sample observation device 100 includes: a table 110; a stage 120 which is arranged and installed on the table 110 and on which a sample 50 is placed in an atmospheric pressure state; first and second axial movement parts 130, 140 which are arranged and installed on the table 110 and relatively movable with the stage 120 to a first axis in one direction and a second axis in a direction intersecting with the first axis; and an electron microscope part 200 which is coupled to the first and second axial movement parts 130, 140, can observe the sample 50 and whose inside is in a vacuum state.
Inventors:
KIM HYUN-JUNG
JUNG DO SOON
JUNG DO SOON
Application Number:
JP2015043543A
Publication Date:
October 05, 2015
Filing Date:
March 05, 2015
Export Citation:
Assignee:
CHARM ENGINEERING CO LTD
International Classes:
H01J37/20; H01J37/16; H01J37/18; H01J37/22; H01J37/28
Domestic Patent References:
| JP2007207683A | 2007-08-16 | |||
| JP2013251262A | 2013-12-12 | |||
| JPH07130315A | 1995-05-19 | |||
| JP2013115384A | 2013-06-10 | |||
| JP2014157772A | 2014-08-28 |
Attorney, Agent or Firm:
Maeda patent office
Previous Patent: SECONDARY BATTERY
Next Patent: SILICON/CARBON COMPOSITE ANODES FOR LITHIUM-ION BATTERIES WITH SUSTAINED HIGH CAPACITY PER UNIT AREA
Next Patent: SILICON/CARBON COMPOSITE ANODES FOR LITHIUM-ION BATTERIES WITH SUSTAINED HIGH CAPACITY PER UNIT AREA