Title:
サンプル位置決めシステム及び方法
Document Type and Number:
Japanese Patent JP7464794
Kind Code:
B2
Abstract:
A sample positioning system is disclosed. The system may include an imaging detector. The system may further include a controller communicatively coupled to the imaging detector and a sample stage, the controller including one or more processors configured to execute program instructions causing the one or more processors to: receive a current position of a field of view of the imaging detector; receive a target position of the sample; receive locations of reference features along a path; direct the sample stage to translate the sample along the path; direct the imaging detector to capture images of the reference features along the path; determine positioning errors of the sample stage along the path based on the images of the reference features; and adjust at least one of a velocity of the sample stage or the path to the target location based on the positioning errors during translation.
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Inventors:
Granot Asaf
Application Number:
JP2023520314A
Publication Date:
April 09, 2024
Filing Date:
October 22, 2020
Export Citation:
Assignee:
KLA Corporation
International Classes:
G02B21/24; G01B11/00; G02B21/00; H01L21/66
Domestic Patent References:
| JP2006267250A | ||||
| JP2013195958A | ||||
| JP2005017270A | ||||
| JP2005091342A | ||||
| JP2016148701A | ||||
| JP2021521418A |
Attorney, Agent or Firm:
Patent Attorney Corporation YKI International Patent Office