Title:
SAMPLE PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2023107397
Kind Code:
A
Abstract:
To provide a sample processing device capable of easily preventing an optical apparatus from colliding with an ion source.SOLUTION: A sample processing device processes a sample by irradiating the sample with an ion beam, and includes: an ion source for emitting an ion beam; a chamber in which the sample is accommodated; a sample stage for holding the sample; a drawing mechanism for drawing the sample stage from the chamber; an optical apparatus that is attached to the drawing mechanism and disposed at an observation position where the sample can be observed when the drawing mechanism is opened and the sample stage is drawn; and a guide for converting linear motion of the drawing mechanism performed when the drawing mechanism is closed and the sample stage is pushed into the chamber, into rotational motion of the optical apparatus so as to guide the optical apparatus to a retreat position separated from the ion source.SELECTED DRAWING: Figure 6
Inventors:
KOZUKA MIHIRO
NEGISHI TSUTOMU
NEGISHI TSUTOMU
Application Number:
JP2022008572A
Publication Date:
August 03, 2023
Filing Date:
January 24, 2022
Export Citation:
Assignee:
JEOL LTD
International Classes:
H01J37/20; H01J37/305
Attorney, Agent or Firm:
Yukio Fuse
Michie Obuchi
Yoshinobu Yoshida
Michie Obuchi
Yoshinobu Yoshida