Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
SAMPLE STAGE
Document Type and Number:
Japanese Patent JPH06309035
Kind Code:
A
Abstract:

PURPOSE: To enable an observation which minimizes the escape of an observed image by coinciding the centers of curvature of both slanting stages with an observation point of a sample.

CONSTITUTION: When a spacer 17 is slid in the X direction, an X-axial guide member 13 and an X-directional slanting stage 14 move perpendicularly along a Z-directional guide member 18 to correct the deviation in the center of curvature between the X-directional slanting stage 14 and the Y-directional slanting stage 12 due to a machining error and an assembly error. When a spacer 24 is slid in the X-direction, a worm 21 and a bearing 23 move perpendicularly along a Z-directional guide member 25 to correct the meshing of a worm gear 20 due to the machining error and assembly error. When a spacer 34 is slid in the Y direction, a worm 31 and a bearing 33 move perpendicularly along a Z-directional guide member 35 to correct the machining error and assembly error or the meshing of a worm gear 30 caused as a result of the X-axial sliding of the spacer 17 and the perpendicular movement of the X-directional slanting guide member 13 and X-directional slanting stage 14.


Inventors:
IMAIZUMI MIZUKI
Application Number:
JP9410593A
Publication Date:
November 04, 1994
Filing Date:
April 21, 1993
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
HITACHI LTD
International Classes:
G02B21/26; G05D3/00; (IPC1-7): G05D3/00; G02B21/26
Attorney, Agent or Firm:
Ogawa Katsuo