Title:
試料温度の制御方法
Document Type and Number:
Japanese Patent JP5433171
Kind Code:
B2
Abstract:
A method of stably controlling the temperature of a sample placed on a sample stage to a desired temperature by estimating a sample temperature accurately, the sample stage including a refrigerant flow path to cool the sample stage, a heater to heat the sample stage, and a temperature sensor to measure the temperature of the sample stage. This method comprises the steps of: measuring in advance the variation-with-time of supply electric power to the heater, temperature of the sample, and temperature of the temperature sensor, without plasma processing; approximating the relation among the measured values using a simultaneous linear differential equation; estimating a sample temperature from the variation-with-time of sensor temperature y1, heater electric power u1, and plasma heat input by means of the Luenberger's states observer based on the simultaneous linear differential equation used for the approximation; and performing a feedback control of sample temperature using the estimated sample temperature.
Inventors:
Naoyuki Koto
Tsunehiko Tsubone
Tsunehiko Tsubone
Application Number:
JP2008156859A
Publication Date:
March 05, 2014
Filing Date:
June 16, 2008
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01L21/3065
Domestic Patent References:
| JP11097375A | ||||
| JP2006080222A |
Foreign References:
| US20020000783 |
Attorney, Agent or Firm:
Patent Business Corporation Takewa International Patent Office