Title:
試料搬送装置、トレー、及びＸ線測定装置
Document Type and Number:
Japanese Patent JP5614837
Kind Code:
B2
Inventors:
禧久 敦徳
Application Number:
JP2010164092A
Publication Date:
October 29, 2014
Filing Date:
July 21, 2010
Export Citation:
Assignee:
株式会社リガク
International Classes:
G01N23/20; G01N1/00; H01L21/677
Attorney, Agent or Firm:
Kuniaki Yokogawa