Title:
サファイア基板及びその製造方法
Document Type and Number:
Japanese Patent JP5226695
Kind Code:
B2
Abstract:
A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 mum/cm2, wherein nTTV is total thickness variation normalized for surface area of the generally planar surface, the substrate having a diameter not less than about 9.0 cm.
Inventors:
Tanichella, Blu Manandam buoy.
Simpson, Matthew A.
Chinnacarpan, Parania bread
Rizut, Robert A.
Bedanzam, Ramanu Jam
Simpson, Matthew A.
Chinnacarpan, Parania bread
Rizut, Robert A.
Bedanzam, Ramanu Jam
Application Number:
JP2009544222A
Publication Date:
July 03, 2013
Filing Date:
December 21, 2007
Export Citation:
Assignee:
SAINT-GOBAIN CERAMICS AND PLASTICS, INC.
International Classes:
H01L21/304; B24B1/00; B24B7/04; B24B37/10
Domestic Patent References:
| JP2002255694A | ||||
| JP2004235794A | ||||
| JP10166259A | ||||
| JP2002052448A | ||||
| JP2006203132A | ||||
| JP2004315314A | ||||
| JP2002293692A | ||||
| JP2010514581A | ||||
| JP2006224201A |
Attorney, Agent or Firm:
Ippei Watanabe
Koji Kikawa
Hiroyuki Sato
Shigeru Koike
Koji Kikawa
Hiroyuki Sato
Shigeru Koike