Title:
SCAN TYPE EXPOSURE DEVICE AND MANUFACTURE OF DEVICE
Document Type and Number:
Japanese Patent JP3524295
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To form a reticule in a larger screen and to improve acceleration at scan driving by comprising a pressing means wherein an original plate is pressed to a moving stage which moves for scanning with the original plate mounted.
SOLUTION: A pressing means which presses a reticule 1 to a moving stage 2 comprises a lamination type piezoelectric element 6, a spindle 7, a spindle holder 8, a lever 9, and a steel ball 10. The spindle 7 is fixed to the moving stage 2 by the spindle holder 8. At one end of the lever 9 which can rotate with the spindle 7 as a center, the lamination type piezoelectric element 6 is assigned between it and the moving stage 2, and at the other end of the lever 9, the steel ball 10 is assigned between it and the reticule 1. The lever 9 and the steel ball 10 are of magnetic material, attracting each other. When the lamination type piezoelectric element 6 is applied with a voltage to press the lever 9 upward, the steel ball 10 contacts to the reticule 1, further, when the specified value of application voltage to the lamination type piezoelectric element 6 is raised, the pressing force is applied to the steel ball 10.
Inventors:
Inoue, Mitsuru
Application Number:
JP27133296A
Publication Date:
May 10, 2004
Filing Date:
September 24, 1996
Export Citation:
Assignee:
CANON INC
International Classes:
G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G03F7/20
Attorney, Agent or Firm:
伊東 哲也
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