Title:
SCANNING APPARATUS IN CASSEGRAINIAN OPTICAL SYSTEM
Document Type and Number:
Japanese Patent JPS6457133
Kind Code:
A
Abstract:
PURPOSE:To improve measuring accuracy and to expand a measuring range, by providing a driving mechanism, which turns the secondary mirror of a Cassegrainian optical system at a specified period, and providing a synchronization control mechanism, which synchronizes the operation of the driving mechanism and the operation of a galvanomirror. CONSTITUTION:Light, which is emitted from a sample 1, is reflected with a main mirror 3, a secondary mirror 4 and a galvanomirror 8 of a Cassegrainian optical system. The light is inputted into a detector 14 and transduced into an electric signal corresponding to the intensity of the light. The signal is inputted into a synchronization control mechanism 18. A signal of, e.g. 50Hz, is applied to the mirror 8 from the control mechanism, and the sample 1 is scanned in the direction X. Likewise, a signal of 0.5Hz is applied to a motor 5, and the secondary mirror 4 is scanned in the direction Y. Meanwhile, a chopper 9 is operated at a frequency of 5kHz with a chopper controller 10. When, the chopper 9 is opened, the emitted light from the sample and stray light I due to the optical system and the like are detected 14. When the chopper 9 is closed, emitted light I0 from a sensor calibrating cavity 11 is detected. Therefore, the emitted light from the sample can be obtained as I-I0. The electric signal from the detector 14 is inputted into a data processor 19 and transduced into temperature.
Inventors:
MATSUMURA ATSUKI
NAKAMORI YUKIO
HOSHINO TAIZO
INAI TORU
NAKAMORI YUKIO
HOSHINO TAIZO
INAI TORU
Application Number:
JP10776987A
Publication Date:
March 03, 1989
Filing Date:
April 30, 1987
Export Citation:
Assignee:
NIPPON STEEL CORP
International Classes:
G01J3/06; G02B26/10; (IPC1-7): G01J3/06; G02B26/10
Attorney, Agent or Firm:
Tachio Chanogi