To provide a scanning electron microscope by which lowering in the sensitivity and the reduction of the scanning range caused, when a detector leaves a specimen is eliminated, and an impact on secondary electrons that are detected by a magnetic field generated by scanning coils is eliminated.
The microscope includes objective lens 2 which radiate charged particles to the specimen; scintillators 11 that are at the same axis 3 of an electron optics system and arranged inside the objective lenses 2 to detect a secondary electron; a photoconductor 13 that guides light optically converted by the scintillators 11 to the outside of the objective lenses 2; and a photomultiplier tube 12, that amplifies light guided by the photoconductor 13 and obtains a signal and scanning coils 4b, that is at least a part of a scanner 4 inside the objective lenses 2 but is installed outside the photoconductor 13, wherein the distance between the detector and the specimen S is shortened by arrangement positions of the scintillators 11 and the scanning coils 4 and solve the problems of lowered sensitivity and reduced scanning range.
OTA MASAHIRO
TAMURA TOMOMI
TOMITA SADAMU
