Title:
走査型電子顕微鏡
Document Type and Number:
Japanese Patent JP5259688
Kind Code:
B2
Abstract:
A seal member to be contacted with an observation object is provided at an open end of a lens barrel so that the observation object can be attracted to the lens barrel via the seal member and fixed in direct and close contact with the lens barrel when a vacuum is created in the lens barrel by a vacuum pump. In other words, instead of providing a sample chamber, the observation object is fixed in close contact with the lens barrel to prevent relative movement therebetween by a suction force even without a sample chamber. In this configuration, the interior of the lens barrel can be maintained in a vacuum state despite the absence of a sample chamber and no adverse effect occurs during observation because the lens barrel and the observation object are not moved relative to each other by vibration.
Inventors:
Kenji Matsumoto
Application Number:
JP2010274626A
Publication Date:
August 07, 2013
Filing Date:
December 09, 2010
Export Citation:
Assignee:
Honda motor industry stock company
International Classes:
H01J37/18; H01J37/143; H01J37/147; H01J37/16; H01J37/20; H01J37/244; H01J37/28
Domestic Patent References:
| JP56032656A | ||||
| JP2004031207A | ||||
| JP7142022A | ||||
| JP2007311117A | ||||
| JP2002203507A | ||||
| JP6215716A |
Attorney, Agent or Firm:
Yoshihito Iizuka
Hideo Hayashi
Ryohei Kaizuka
Hideo Hayashi
Ryohei Kaizuka
Previous Patent: JPS5259687
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