Title:
SCANNING EXPOSURE DEVICE
Document Type and Number:
Japanese Patent JP3521514
Kind Code:
B2
Abstract:
PURPOSE: To obtain a projection optical system which is simplified in structure and enhances throughput and maintenance properties, wherein the projection optical system where an image equal in size and erect is obtained is used for an original plate and a exposure object which are kept vertical in position confronting each other in a scanning exposure process.
CONSTITUTION: A guide 11 which guides a holder 6 that holds an original plate 2 and an exposure object 3 together in one piece is extended beyond a first movement region A which is required for exposure, and an extended guide 12 in a second movement region B is formed extending continuously from the guide 11, whereby the original plate 2 and the exposure object 3 are capable of being moved to a site where a projection optical system 7 shunts, so that the surface of the holder 6 of the original plate 2 and the exposure object 3 and the projection optical system 7 are capable of being easily checked, cleaned, and enhanced in maintenance properties.
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Inventors:
Hamada, Tomohide
Shirasu, Hiroshi
Shirasu, Hiroshi
Application Number:
JP33296894A
Publication Date:
April 19, 2004
Filing Date:
December 14, 1994
Export Citation:
Assignee:
NIKON CORP
International Classes:
G03B27/50; G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G03B27/50; G03F7/20
Attorney, Agent or Firm:
志賀 正武 （外３名）
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