Title:
SCANNING METHOD FOR DEFECT INSPECTING DEVICE OF PATTERN
Document Type and Number:
Japanese Patent JPS60126830
Kind Code:
A
Abstract:
PURPOSE:To prevent the deviation in the line direction to an image and to perform a higher- precision defect inspection on a pattern by a method wherein the scanning is performed in a condition that a one-dimentioal line sensor, which is used for scanning, has been inclined at a constant angle to the scanning region in a body to be inspected. CONSTITUTION:An image sensor 23 consisting of a bit array of one line component is supported by a supporting stand 50 and the sensor 23 is provided in such a rotatable state as indicated by right and left arrows with the axis 51 thereof as a center. One ed of the supporting stand 50 is energized to the downward direction by a spring 52 and one end of a rotating shaft 53 is sbutted in close contact to the lower edge of the suporting stand 50 between the axis 51 and the spring 52. The other end of the rotating shaft 53 is energized to the downward direction by a spring 54, and at the same time, is abutted on an eccentric cam 55. The eccentric cam 55 is rotated by a motor 56 under the control of the control unit and holds the image sensor 23 in a condition that the sensor 23 has been inclined at a constant angle to the scanning region in a body to be inspected. The image sensor 23 is inclined clockwise by a constant angle, which is decided by the scanning rate in the Y direction, and when an ordinary scanning is performed, scanning data, in which a deviation to the scanning region has been prevented, are obtaind. Moreover, as an image enlarged to 25 times has been projected on the image senosr 23, a higher-precision defect inspection on the pattern becomes possible.
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Inventors:
UCHIYAMA YASUSHI
AWAMURA DAIKICHI
AWAMURA DAIKICHI
Application Number:
JP23415183A
Publication Date:
July 06, 1985
Filing Date:
December 14, 1983
Export Citation:
Assignee:
NIPPON JIDOSEIGYO LTD
International Classes:
G01N21/88; G01N21/93; G01N21/956; H01L21/027; H01L21/30; H01L21/66; (IPC1-7): H01L21/30
Domestic Patent References:
| JPS57159023A | 1982-10-01 | |||
| JPS5837923A | 1983-03-05 |
Attorney, Agent or Firm:
Akihide Sugimura