Title:
走査型プローブ顕微鏡の走査方法
Document Type and Number:
Japanese Patent JP4243403
Kind Code:
B2
Abstract:
To provide a scanning method in which a probe is staggered across an uneven surface of a sample without increasing a relative speed thereof, and measurement of physical quantities acting on the probe and sample can be doubled compared with those measured by the conventional raster scan method. This method substantially improves a scanning speed. A probe is staggered relatively over the surface of a sample by +1 scanning unit in X and Y directions, and physical quantities acting on the probe and sample are measured. Thereafter, the probe is staggered by +1 scanning unit in the X direction and by -1 scanning unit in the Y direction so that physical quantities acting on them are measured. The staggering movement of the probe is repeated to measure the physical quantities.
Inventors:
Kazutoshi Watanabe
Application Number:
JP2000006119A
Publication Date:
March 25, 2009
Filing Date:
January 11, 2000
Export Citation:
Assignee:
SII Nanotechnology Co., Ltd.
International Classes:
G01Q10/04; G01B5/28; G01B21/30; G01Q10/06; G01Q70/00
Domestic Patent References:
| JP7243832A | ||||
| JP41948A |
Attorney, Agent or Firm:
Yoshiharu Matsushita