To provide a package of optical scanning elements which modulate the path of reflected light by making a micromirror which, with the application of a predetermined input signal, reflects incident light movable, and a manufacturing method thereof.
The scanning micromirror package comprises a housing 11 to whose upper surface a micromirror die 31 to which a scanning micromirror to reflect incident light is provided is attached, and a lid 20 which is coupled to the housing and forms a space inside. The lid 20 comprises a transparent window 22 through which the incident light 5 and the reflected light 6 can penetrate, and a lid frame 21 to which the transparent window is attached. Packaging the scanning micromirror in this manner enables the optical and mechanical performance to be maximized and embodied in a compact lightweight form, and helps to protect the micromirror from an external factor which is liable to affect the performance. This can be applied to various forms of scanning systems using micromirrors and the cost of components can be reduced.
YEE YOUNG-JOO
LEE SEE-HYUNG
Masakazu Noda