Title:
走査光学系、走査型顕微鏡および走査型共焦点顕微鏡
Document Type and Number:
Japanese Patent JP7218758
Kind Code:
B2
Abstract:
A scanning optical system (SL) comprises a first lens group (G1) having a negative refractive power, a second lens group (G2) having a positive refractive power, and a third lens group (G3) having a negative refractive power. At least one lens included in any of the first to the third lens groups has a positive refractive power, and satisfies the conditional expression “νd1>80”. At least one lens included in any of the first to the third lens group has a negative refractive power, and satisfies the conditional expression “νd2<50”. The scanning optical system satisfies the conditional expression “h max≥18.0 [mm]”.
Inventors:
Yuki Yoshida
Suzuki Akio
Suzuki Akio
Application Number:
JP2020539184A
Publication Date:
February 07, 2023
Filing Date:
August 27, 2018
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G02B21/02; G02B21/00; G02B21/36
Domestic Patent References:
| JP2011128273A | ||||
| JP2013054146A | ||||
| JP2012173491A |
Attorney, Agent or Firm:
Shogo Onishi
Toshiaki Namiki
Toshiaki Namiki
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