Title:
SCANNING PROBE MICROSCOPE APPARATUS
Document Type and Number:
Japanese Patent JP2002168754
Kind Code:
A
Abstract:
To provide a scanning probe microscope capable of observing, evaluating and processing a nano structure by making full use of respective features of a SEM function and a SPM function.
A scanning probe microscope apparatus 1 comprises a scanning electron microscope 2 having a sample base 3 on which a sample A is set and a scanning probe microscope 4 mounted on the sample base 3.
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Inventors:
KAWAKATSU HIDEKI
Application Number:
JP2000365119A
Publication Date:
June 14, 2002
Filing Date:
November 30, 2000
Export Citation:
Assignee:
JAPAN SCIENCE & TECH CORP
International Classes:
G01B21/30; G01N23/225; G01Q20/02; G01Q30/02; G01Q30/08; G01Q30/10; G01Q30/20; G01Q60/18; G01Q60/22; G01Q60/24; G01Q80/00; G01Q90/00; (IPC1-7): G01N13/10; G01B21/30; G01N23/225
Attorney, Agent or Firm:
Shimizu Mamoru
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