Title:
走査型プローブ顕微鏡および走査型プローブ顕微鏡における光軸調整方法
Document Type and Number:
Japanese Patent JP7255521
Kind Code:
B2
Abstract:
It is intended to save time for adjusting a position of a detection unit. In a position adjustment process of a detector, a control device moves the detector obliquely with respect to a boundary line partitioning photodiodes on a plane on which the detector moves and moves the detector so that the position of the center of gravity of a spot of a laser beam and the center of a light-receiving surface coincide in response to the incident of at least a part of the laser beam on the light-receiving surface.
Inventors:
Mountain Saki Kenji
Application Number:
JP2020030468A
Publication Date:
April 11, 2023
Filing Date:
February 26, 2020
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
G01Q20/02; G01Q10/00
Domestic Patent References:
| JP200314611A | ||||
| JP2000146808A | ||||
| JP2001194284A |
Foreign References:
| US6294774 | ||||
| WO2016189651A1 | ||||
| US20190324053 |
Attorney, Agent or Firm:
Patent Attorney Fukami Patent Office