Title:
SCANNING PROBE MICROSCOPE
Document Type and Number:
Japanese Patent JP2001074635
Kind Code:
A
Abstract:
To obtain a scanning probe microscope that is capable of accurate observation.
A substrate where a cantilever with a probe is fixed to a lever holder by the high-vacuum metal deposition is fixed to a lever holder. The central part of the lever holder 20 has a hole 21. A hard rubber plate 23 is stuck to a surface at the sample side of the lever holder 20 so that a hole 22 that is open at the central part overlaps with the hole 21. A vacuum pump 24 is connected to the hole 21 of the lever holder 20 by an exhaust pipe 25 that is created by a flexible material. By operating the vacuum pump, a substrate 7 where the cantilever 2 is formed is sucked by the lever holder 20 via the hard rubber plate 23.
Inventors:
KITAMURA SHINICHI
Application Number:
JP24525599A
Publication Date:
March 23, 2001
Filing Date:
August 31, 1999
Export Citation:
Assignee:
JEOL LTD
International Classes:
H01J37/20; G01B7/34; G01B21/30; G01Q60/24; G01Q70/02; H01J37/28; (IPC1-7): G01N13/16; G01B7/34; G01B21/30; H01J37/20