SCANNING PROBE MICROSCOPE

Title:

SCANNING PROBE MICROSCOPE

Document Type and Number:

Japanese Patent JP3836639

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To provide a low-cost scanning probe microscope capable of acurately aligning a laser beam to a cantilever.
SOLUTION: A red laser beam from a laser beam source 12 strikes a half mirror 11, and one half of it is reflected by the half mirror 11 and directed in the direction of a cantilever 5. By the use of a blue filter 10, an operator can view only the center point of a laser spot of the highest intensity, without viewing a laser beam reflected irregularly on the cantilever 5. In the case the laser beam is not striking the tip of the cantilever 5, an irradiation location adjusting means 13 is operated by the operator, so that the laser beam striks the tip of the cantilever 5. Furthermore fine adjustment is made on the irradiation location adjusting means 13 by the operator, so that he shape of the spot becomes circular or elliptical, and that the intensity of the laser beam becomes strong, while viewing a red screen 17.

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Inventors:

Keiichi Nakamoto

Application Number:

JP26047099A

Publication Date:

October 25, 2006

Filing Date:

September 14, 1999

Export Citation:

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