Title:
走査型プローブ顕微鏡
Document Type and Number:
Japanese Patent JP4068533
Kind Code:
B2
Inventors:
Satoshi Hasumura
Kazutoshi Watanabe
Kazunori Ando
Toshiya Nishimura
Kazutoshi Watanabe
Kazunori Ando
Toshiya Nishimura
Application Number:
JP2003299514A
Publication Date:
March 26, 2008
Filing Date:
August 25, 2003
Export Citation:
Assignee:
SII Nanotechnology Co., Ltd.
International Classes:
G01B7/34; G01B21/30; G01Q30/08; G01Q30/16; G01Q30/20; G01Q60/10; G01Q60/24; G01Q60/46; G01Q70/02; G01Q90/00
Domestic Patent References:
| JP10332716A | ||||
| JP5215543A | ||||
| JP2003234079A | ||||
| JP9318638A | ||||
| JP10111301A |
Attorney, Agent or Firm:
Yoshiharu Matsushita