Title:
走査型プローブ顕微鏡
Document Type and Number:
Japanese Patent JP4739121
Kind Code:
B2
Inventors:
Masatoshi Yasutake
Umeki Takeshi
Umeki Takeshi
Application Number:
JP2006155995A
Publication Date:
August 03, 2011
Filing Date:
June 05, 2006
Export Citation:
Assignee:
SII Nanotechnology Co., Ltd.
International Classes:
G01Q10/06; G01Q30/02; G01Q60/32; G01Q60/38; G01Q60/54; G01Q70/06; G01Q70/10; G01Q80/00; G01Q90/00
Domestic Patent References:
| JP2004306197A | ||||
| JP2004276177A |
Foreign References:
| WO2006054771A1 |
Attorney, Agent or Firm:
Kentaro Kuhara
Noriaki Uchino
Nobuyuki Kimura
Noriaki Uchino
Nobuyuki Kimura