Title:
走査型プローブ顕微鏡
Document Type and Number:
Japanese Patent JP6460227
Kind Code:
B2
Abstract:
A scanning probe microscope capable of increasing a relative speed of a probe and making noise unlikely to occur in a measurement result for the surface shape of a sample. When a relative movement direction of the probe is switched at the time of reciprocation in an X direction and a direction opposite to the X direction, the relative speed is gradually decreased and then the direction is switched, and after the switching, the relative speed is gradually increased, to prevent a rapid change in the relative speed. At the time of shifting the probe in a Y direction and a direction opposite to the Y direction, the relative speed of the probe is gradually increased and then the relative speed is gradually decreased, to prevent a rapid change in the relative speed.
Inventors:
Masato Hiraide
Application Number:
JP2017512495A
Publication Date:
January 30, 2019
Filing Date:
April 14, 2015
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
G01Q10/04; G01Q10/02
Domestic Patent References:
| JP2002350318A | ||||
| JP8235651A | ||||
| JP2010066077A | ||||
| JP2001194284A | ||||
| JP4432806B2 |
Attorney, Agent or Firm:
Yoshimoto Riki
Masato Shintaku
Masato Shintaku