Title:
走査型トンネル顕微鏡、その探針、その探針の処理方法及び微細構造物作製方法
Document Type and Number:
Japanese Patent JP3624212
Kind Code:
B2
Abstract:
The invention provides a probe for use with a scanning tunneling microscope, a method of treating the probe, and a method of fabricating a nano-structure, which facilitates formation of a continuous nano-structure. The probe for the scanning tunneling microscope is formed of an Ag2S crystal having both ion conductivity and electron conductivity. Voltage and tunnel current are applied between the probe and a substrate in order to move movable Ag ions to thereby grow, on the tip end of the probe, a projection (mini chip) composed of Ag ions or Ag atoms. The polarity of the applied voltage is reversed after the growth of the projection in order to return the Ag ions or Ag atoms constituting the grown projection (mini chip) into the Ag2S crystal to thereby contract the projection. Thus, the probe can have a projection composed of Ag ions or Ag atoms and a regulated shape. Further, the movable ions or atoms of the mixed-conductive material are transferred onto the substrate so as to form a nano-structure on the substrate.
Inventors:
Masakazu Aono
Tomonobu Nakayama
Kazuya Terabe
Tomonobu Nakayama
Kazuya Terabe
Application Number:
JP2000618709A
Publication Date:
March 02, 2005
Filing Date:
November 16, 1999
Export Citation:
Assignee:
Japan Science and Technology Agency
RIKEN
RIKEN
International Classes:
B82B3/00; G01B7/34; G01Q60/10; G01Q60/16; G01Q80/00; (IPC1-7): G01N13/12; G12B21/04
Domestic Patent References:
| JP9288115A | ||||
| JP7120430A | ||||
| JP674899A | ||||
| JP6283129A | ||||
| JP6275322A | ||||
| JP3179202A |
Other References:
「化学」編集部,世界一細かい化学エッチング,別冊化学「これはすごい!化学の世界記録集」,日本,化学同人,1999年 5月 1日,第30頁-第32頁
Attorney, Agent or Firm:
Mamoru Shimizu
Kenji Yoshitake
Kenji Yoshitake