Title:
走査トンネル顕微鏡
Document Type and Number:
Japanese Patent JP4146253
Kind Code:
B2
Inventors:
Hideo Kojima
Application Number:
JP2003018407A
Publication Date:
September 10, 2008
Filing Date:
January 28, 2003
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
G01B7/34; G01B21/30; G01Q10/06; G01Q30/02; G01Q60/10; G01Q60/12
Domestic Patent References:
| JP6176732A | ||||
| JP62285005A | ||||
| JP11101807A | ||||
| JP2004157071A |
Attorney, Agent or Firm:
Hideo Sugai
Ryukichi Abe
Hirukawa Masanobu
Norihiko Uchida
Kenji Aoki
Hiroshi Nagisawa
Akira Yonezawa
Ryukichi Abe
Hirukawa Masanobu
Norihiko Uchida
Kenji Aoki
Hiroshi Nagisawa
Akira Yonezawa