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Patent Searching and Data


Title:
SCANNING TYPE CONFOCAL MICROSCOPE
Document Type and Number:
Japanese Patent JPH1090606
Kind Code:
A
Abstract:

To obtain an image of high quality with a relatively low cost by constituting a confocal microscope so as to be able to scan a subject to be tested on at least one line of an axis while using a moving objective lens.

A part 12 of the radiated output 11 of a light source 1 is reflected at a beam splitter 3 and collimated in a lens 4. Next, part 12 of light beams 12a is focused by a movable objective lens 5 of low resonance and low mass which can be supported by a flexible material. When one part of a subject to be tested 7 enters into the focus 13 of the objective lens 5, a light beam 14 returns to the beam splitter 3 along beam paths 14, 14b and 14a. One part 14c of the light beam 14 irradiating the beam splitter 3 passes a lens 8 to be focused on pinhole openings 9. The quantity and the intensity of a light beam to be detected with a detector 10 are made to be related to a distance from the focus 13 on a beam axis to the reflecting part of the subject to be tested 7.


Inventors:
BOETTNER MATTHEW C
OUDERKIRK STEVEN J
Application Number:
JP14398397A
Publication Date:
April 10, 1998
Filing Date:
June 02, 1997
Export Citation:
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Assignee:
KOVEX CORP
International Classes:
G01B9/04; G02B21/00; G02B21/02; G02B26/10; (IPC1-7): G02B21/00; G01B9/04; G02B21/02; G02B26/10
Attorney, Agent or Firm:
Takashi Ishida (3 others)