Title:
SCANNING TYPE ELECTRON MICROSCOPE
Document Type and Number:
Japanese Patent JP3310688
Kind Code:
B2
Abstract:
PURPOSE: To place a large-sized specimen on a stage without destroying into minor pieces and observe with a high resolution by furnishing a specimen holding means which supports a Y-direction moving body to place specimen on an X-direction moving body between the first and second magnetic poles of an objective lens.
CONSTITUTION: An electron ray EL emitted by an electron gun 24 is converged by convergence lenses 26, 28, passed by an upper magnetic pole 42 of an objective lens 32 through the action of a scanning coil 30, cast on a specimen W for scanning it, and the secondary electrons SE emitted there are received by a sensor 36 to serve inspecting. Because the specimen W is placed between the upper magnetic pole 42 and lower magnetic pole 44, a lens with small spherical astigmatism is formed, and the secondary electron efficiency is enhanced to lead to enhancement of the resolution. Between these poles 42, 44, a specimen stage 34 is installed of a structure to support a Y-direction moving body to place the specimen W on an X-direction moving body. This permits placing large-sized specimen on the stage without destroying into minor pieces and observing it with a high resolution.
Inventors:
Takashi Kimura
Application Number:
JP7556392A
Publication Date:
August 05, 2002
Filing Date:
February 27, 1992
Export Citation:
Assignee:
Topcon Co., Ltd.
International Classes:
H01J37/20; H01J37/28; (IPC1-7): H01J37/20; H01J37/28
Domestic Patent References:
| JP38250A | ||||
| JP61277143A | ||||
| JP6142771U |
Attorney, Agent or Firm:
Toru Tanabe