To keep the consistent function of a galvano mirror by simply monitoring the temperature of a mirror holder of a galvano scanner to reliably prevent any excessive temperature rise.
A temperature monitoring unit in a laser beam machining apparatus has a bar-shaped or probe-shaped X-axis thermal interlocking unit 90X and Y-axis thermal interlocking unit 90Y which are arranged in a scanner casing 60 close to an X-axis mirror holder 78X and a Y-axis mirror holder 78Y, respectively, so as not to interfere in their rotating (oscillating) motions. The X-axis thermal interlocking unit 90X (the Y-axis thermal interlocking unit 90Y) accommodates a thermal switch as a temperature-sensing element deeply inside a cylindrical casing to electrically connect the internal thermal switch to an external control circuit via an electric cable 96X (96Y).
KENCHI SHIGEYUKI
IGARASHI HIROYUKI
KASE JUNPEI
ADACHI KOJI
JP2005040843A | 2005-02-17 | |||
JP2004130324A | 2004-04-30 | |||
JPH0751870A | 1995-02-28 | |||
JP2007199682A | 2007-08-09 |
US0007014A | 1850-01-15 | |||
US5303081A | 1994-04-12 | |||
US0005012A | 1847-03-13 | |||
US5005929A | 1991-04-09 |
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