Title:
SCANNING-TYPE PROBE MICROSCOPE
Document Type and Number:
Japanese Patent JP3387846
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain high detection sensitivity without fixing a probe and a piezoelectric body in one piece by flexibly pinching the probe with first and second elastic bodies and allowing the first elastic body to have a piezoelectric body.
SOLUTION: In an elastic body 201 for pinching a probe 101 flexibly, a piezoelectric body 202 is formed on a surface, and an elastic body 206 also plays a role of a vibrator. A probe 101 that is excited up and down in the elastic body 206 is bent and vibrated with a part in contact with the elastic body 201 as a support, and at the same time the elastic body 201 causes bending deformation with the contact part as a pressure cone apex since compliance is large. Therefore, at the moment when the probe 101 moves up and down, the elastic body 201 is bent and deformed in a peripheral direction, the piezoelectric body 202 expands and contracts to generate a bipolar voltage. In this case, when the frequency of the elastic body 206 is swept, the vibration amplitude of the probe 101 increases closer to a mechanical, natural frequency. As the amplitude increases, the expansion and contraction of the piezoelectric body 202 also increases and a generated voltage increases. By monitoring the change in the generated voltage, the resonance characteristics of the probe 101 can be detected.
Inventors:
Katsunori Homma
Hiroshi Muramatsu
Akira Egawa
Hiroshi Muramatsu
Akira Egawa
Application Number:
JP5760399A
Publication Date:
March 17, 2003
Filing Date:
March 04, 1999
Export Citation:
Assignee:
Seiko Instruments Inc.
International Classes:
G01B11/30; G01N37/00; G01Q10/00; G01Q60/24; G01Q60/26; G01Q60/32; G01Q60/38; (IPC1-7): G01N13/16; G12B21/08; G12B21/22
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Attorney, Agent or Firm:
Masaaki Sakaue