PURPOSE: To obtain a scanning type probe microscope, which can obtain the image that accurately expresses the surface of a sample.
CONSTITUTION: An optical lever sensor unit 4, which detects the displacement of a cantilever 5, is attached on a cylindrical piezoelectric body 15, which is provided on a (z) stage. A (z) displacement detecting sensor 13 for detecting the (z) position of the optical-lever sensor unit 4 is attached to the upper end of the (z) stage 9. A cylindrical piezoelectric body 7, wherein a sample stage 24 is provided at the upper end, and displacement detecting sensors 14a and 14b for detecting the x-y positions of a sample 6 are provided in the inside of the cylindrical piezoelectric body 15. The cylindrical piezoelectric body 7 performs the x-y scanning in accordance with the scanning signal from a microcomputer 31. During this period, the cylindrical piezoelectric body 15 is expanded and contracted in accodance with a servo signal from a (z) control circuit 34 and keeps the displacement of the cantilever 5 constant. A host computer 32 receives each displacement signal, forms the image of the surface of the sample based on the displacement signals and displays the image.