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Patent Searching and Data


Title:
SCANNING TYPE PROBE MICROSCOPE
Document Type and Number:
Japanese Patent JPH0626852
Kind Code:
A
Abstract:

PURPOSE: To obtain a scanning type probe microscope, which can obtain the image that accurately expresses the surface of a sample.

CONSTITUTION: An optical lever sensor unit 4, which detects the displacement of a cantilever 5, is attached on a cylindrical piezoelectric body 15, which is provided on a (z) stage. A (z) displacement detecting sensor 13 for detecting the (z) position of the optical-lever sensor unit 4 is attached to the upper end of the (z) stage 9. A cylindrical piezoelectric body 7, wherein a sample stage 24 is provided at the upper end, and displacement detecting sensors 14a and 14b for detecting the x-y positions of a sample 6 are provided in the inside of the cylindrical piezoelectric body 15. The cylindrical piezoelectric body 7 performs the x-y scanning in accordance with the scanning signal from a microcomputer 31. During this period, the cylindrical piezoelectric body 15 is expanded and contracted in accodance with a servo signal from a (z) control circuit 34 and keeps the displacement of the cantilever 5 constant. A host computer 32 receives each displacement signal, forms the image of the surface of the sample based on the displacement signals and displays the image.


Inventors:
MIYAMOTO YASUSHI
Application Number:
JP18108792A
Publication Date:
February 04, 1994
Filing Date:
July 08, 1992
Export Citation:
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Assignee:
OLYMPUS OPTICAL CO
International Classes:
G01B21/30; G01Q20/02; G01Q60/10; G01Q60/24; G01Q60/50; H01J37/28; (IPC1-7): G01B21/30; H01J37/28
Attorney, Agent or Firm:
Takehiko Suzue