To provide a scanning type probe microscope capable of accurately measuring not only the surface unevenness of a sample but also impurities such as foreign matter present on the surface of the sample.

The signal obtained from the probe part 1 for an AFM (interatomic force microscope) is processed by an AFM measuring circuit 4a to be stored in a surface shape memory part 4b. An STM (scanning type tunnel microscope) probe driving circuit 4c moves a probe 2a for an STM up and down along the surface shape of a sample on the basis of stored data according to the command of an operational control part 4b and the signal showing a tunnel current obtained from the probe part 2 for the STM is processed by an STM measuring circuit 4d to be successively stored in an STM signal memory part 4e. The operational control part 4f reads the measured data related to the tunnel current of a predetermined region from the STM signal memory part 4e and it is judged that impurities such as foreign matter are present at the position on the sample corresponding to the part where the read measured data is shifted from a predetermined value.