Title:
SCANNING TYPE TUNNEL MICROSCOPE
Document Type and Number:
Japanese Patent JPH0526612
Kind Code:
A
Abstract:
PURPOSE:To prevent the damage on a probe and the surface of a sample and simply determine the work function with high precision. CONSTITUTION:An element generating a signal against pressure is provided between a scanning element 7 and a probe 8 to prevent the damage on the probe 8 and the surface of a sample 12, collect the data with high reliability, and simply measure the work function with high precision in the scanning device of a scanning type tunnel microscope. When the probe 8 is brought into contact with the surface of the sample 12, the contact of the probe 8 is displayed on a display device, or the operation of the device is interrupted.
Inventors:
YAMAUCHI HIROSHI
SAKAI MASANORI
SAKAI MASANORI
Application Number:
JP17796791A
Publication Date:
February 02, 1993
Filing Date:
July 18, 1991
Export Citation:
Assignee:
HITACHI LTD
International Classes:
G01B7/34; G01N37/00; G01Q10/04; G01Q60/10; H01J37/28; (IPC1-7): G01B7/34; H01J37/28
Attorney, Agent or Firm:
Yukihiko Takada
Next Patent: JPH0526613