Title:
SCRIBE METHOD AND SCRIBE DEVICE
Document Type and Number:
Japanese Patent JP2017019290
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a scribe method which refers to an actual position of an alignment mark irrespective of positional displacement, angle displacement or the like at the positioning of a glass baseboard, and without being affected by a thermal expansion mechanical error of a moving mechanism part of a scribe head, and can exactly form a scribe line in a scheduled position, and to provide a scribe device.SOLUTION: In a scribe method, a scribe device 1 comprises a CCD camera 10 for moving a coordinate system integrally with a scribe head, aligns a camera sensor of the CCD camera 10 on three points of alignment marks, measures a coordinate of a mark center of three points of the alignment marks, detects an error between the mark center coordinate and a camera center, performs calculation processing such as coordinate rotation, right angle correction and moving amount correction on the basis of the error, converts an actual coordinate of the mark center of the alignment marks into a work coordinate system Z', and operates a scribe in the converted work coordinate system Z'.SELECTED DRAWING: Figure 1
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Inventors:
FUNASHIRO AKIRA
Application Number:
JP2016203947A
Publication Date:
January 26, 2017
Filing Date:
October 17, 2016
Export Citation:
Assignee:
BANDO KIKO CO
International Classes:
B28D5/00; C03B33/037; H01L21/301
Domestic Patent References:
| JPH061628A | 1994-01-11 | |||
| JPH0573934U | 1993-10-08 | |||
| JP2011178651A | 2011-09-15 |
Attorney, Agent or Firm:
Takeshi Takada