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Patent Searching and Data


Title:
SCROLL PUMP WITH ISOLATION BARRIER
Document Type and Number:
Japanese Patent JP2011085132
Kind Code:
A
Abstract:

To provide an improved method of isolating a running gear of a scroll pump from a vacuum space.

A scroll pumping apparatus includes: a first scroll element and a second scroll element; a drive mechanism operatively coupled to the second scroll element for generating the orbiting motion of the second scroll element relative to the first scroll element, the drive mechanism having an axis of rotation; and an isolation element to isolate a first space and a second space in the scroll pumping apparatus. The isolation element includes a first resilient annular member coupled directly or indirectly to the first scroll element, a second resilient annular member coupled directly or indirectly to the second scroll element, and a tubular member coupled between the first and second annular members.


Inventors:
Calhoon, John
Filip, Romeo Boris
Boudreau, Ronald Bernard
Application Number:
JP2010000215616
Publication Date:
April 28, 2011
Filing Date:
September 27, 2010
Export Citation:
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Assignee:
VARIAN INC
International Classes:
F04C27/00; F04C18/02; F04C25/02
Domestic Patent References:
JPH1150980A
JPS485011A
JPH11500804A
JP2008528853A
JP2008516146A
JPS6254294U
JPH1150980A
JPS485011A
JPH11500804A
Attorney, Agent or Firm:
稲岡 耕作
川崎 実夫
河津 康一