Title:
【発明の名称】真空ポンプ用スクロールタイプ流体容積形装置
Document Type and Number:
Japanese Patent JP2002527670
Kind Code:
A
Abstract:
A scroll-type vacuum pump wherein an expander and a compressor are arranged in series, in two stages, in the same housing and driven by the same shaft. The first stage is a scroll-type expander. It is in series with a scroll-type compressor, which is the second stage. The volume of the suction pockets of the second stage, the compressor, is not significantly smaller than the volume of the discharge pockets of the first stage device, the expander. Thus, the amount of heat associated with the re-expansion and compression process is reduced. The two stage pump also includes a double shaft seal mechanism which seals off the suction chamber of the expander from both the ambient and the discharge chamber of the expander. The two stage pump of the invention further includes a labyrinth structure at the tip surfaces of the scroll elements to tightly control the axial gap between the tips and bases of the mating scroll elements.
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Inventors:
Nice Shimao
Application Number:
JP2000576176A
Publication Date:
August 27, 2002
Filing Date:
October 13, 1999
Export Citation:
Assignee:
Mind Tech Corporation
International Classes:
F04C18/02; F04C23/00; F04C23/02; F04C25/02; F04C27/00; F04C29/00; F02B53/00; (IPC1-7): F04C23/02; F02B53/00; F04C18/02; F04C25/02; F04C27/00; F04C29/00
Domestic Patent References:
| JPS57152480U | 1982-09-24 | |||
| JPH07139480A | 1995-05-30 | |||
| JPH05332272A | 1993-12-14 | |||
| JPH04214978A | 1992-08-05 | |||
| JPH0763176A | 1995-03-07 |
Attorney, Agent or Firm:
Minoru Nakamura (10 outside)