Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
SCROLL VACUUM PUMP
Document Type and Number:
Japanese Patent JPS6380089
Kind Code:
A
Abstract:

PURPOSE: To obtain a high vacuum scroll pump, by containing the scroll pump in a container coupled with a vacuum container and bearing a spindle formed with a port communicatable to a delivery port air-tightly in an oil-encapsulated container.

CONSTITUTION: A scroll pump comprising a drive scroll 1 and a driven scroll 2 is contained in a first container 3 communicated through an intake port 3a with a vacuum container, while a drive shaft 1f coupled to the drive scroll 1 is born air-tightly in a second container 7 having a communication port 15a with the atmospheric air and encapsulated with oil 7b. The drive shaft 1f is formed with a port 1d communicatable with a delivery port 1c of the scroll pump and a delivery valve section 24, and said communication port 1d is opened through a delivery hole 1e to the oil 7b encapsulated in a second container 7. Since the encapsulated oil 7b passed through the delivery hole 1e and the communication port 1d and fills the delivery valve 24 section and the delivery port 1c, the air-tightness of the scroll pump is improved and the available degree of vacuum is improved.


More Like This:
WO/2018/197834VACUUM PUMPING SYSTEM
JP5725660Claw pump
Inventors:
NISHIDA MITSUHIRO
MORISHITA ETSUO
Application Number:
JP22697686A
Publication Date:
April 11, 1988
Filing Date:
September 24, 1986
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
F04C25/02; F04C18/02; F04C27/00; F04C29/00; F04C29/12; (IPC1-7): F04C18/02; F04C25/02; F04C27/00; F04C29/00
Domestic Patent References:
JPS4834787A1973-05-22
JPS58110885A1983-07-01
JPS6075792A1985-04-30
JPS5919080A1984-01-31
JPS58190595A1983-11-07
Attorney, Agent or Firm:
Mamoru Takada (1 person outside)