Title:
SCRUBBER FOR CLEANING SUBSTRATES
Document Type and Number:
Japanese Patent JP3093872
Kind Code:
B2
Abstract:
PURPOSE: To provide a durable scrubber which leaves no uncleaned portion or causes no scratch in cleaning a rectangular substrate.
CONSTITUTION: A scrubber 3 for cleaning a substrate having a roll 1 provided with cloth 21 and a brush 22. The scrubber 3 cleans an almost rectangular substrate 4 rotating on the axis of the central normal perpendicular to the axis of the roll 1 by contacting the cloth 21 and the brush 22 with the substrate 4. The cloth 21 is implanted in a portion of the roll 1 to be put into contact with the area within the inscribed circle to the substrate 4; the brush 22 is implanted in a portion of the roll 1 to be put into contact with the area outside the inscribed circle to the substrate 4.
Inventors:
Wataru Goto
Yasutaka Morikawa
Yasutaka Morikawa
Application Number:
JP13086192A
Publication Date:
October 03, 2000
Filing Date:
May 22, 1992
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
B08B1/04; G03F1/82; H01L21/304; A46B7/10; (IPC1-7): H01L21/304; A46B7/10; B08B1/04; G03F1/08
Domestic Patent References:
JP6449232A | ||||
JP58182234A | ||||
JP6392319A | ||||
JP2152231A | ||||
JP63308320A |
Attorney, Agent or Firm:
Hiroshi Nirazawa (7 outside)