Title:
SINTERING CONDITION MONITORING METHOD FOR CERAMIC SUBSTRATE AND ITS DEVICE
Document Type and Number:
Japanese Patent JP3186308
Kind Code:
B2
Abstract:
PURPOSE: To provide a monitoring means for monitoring the sintering condition of a ceramic substrate quantitatively by quantitatively finding a glass amount in a ceramic substrate pattern part.
CONSTITUTION: Following grinding of the surface of a ceramic substrate 1 after sintering, an image, which is detected by an optical system consisting of a light source 3, a sensor 4, a polarizer 5, an analyzer 6, and a group of lenses 10a, 10b, 10c, a half mirror 11, and the like, is processed by an image processing part 7, so that a glass amount in a ceramic substrate pattern part, is found, and subsequently, the glass amount is used as the sintering condition information.
Inventors:
Hisae Yamamura
Kazushi Yoshimura
Takanori Ninomiya
Mineo Nomoto
Kazushi Yoshimura
Takanori Ninomiya
Mineo Nomoto
Application Number:
JP4894393A
Publication Date:
July 11, 2001
Filing Date:
March 10, 1993
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
G01N21/21; G01N21/84; G01N21/956; H05K3/46; (IPC1-7): G01N21/84; H05K3/46
Domestic Patent References:
| JP61181906A | ||||
| JP1263540A |
Attorney, Agent or Firm:
Yasuo Sakuta