Title:
SEAL OF VACUUM VALVE AND PRODUCTION METHOD THEREFOR
Document Type and Number:
Japanese Patent JP2018159467
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a seal component for a closure element or a valve seat of a vacuum valve to improve process reliability.SOLUTION: A vacuum valve includes: a valve seat having a first seal surface; and a closure element having a second seal surface corresponding to the first seal surface. The first seal surface and/or the second seal surface has a component material composite comprising a metallic carrier component 41 and a polymer-based seal material 45. The seal material has a defined profile and is applied onto the carrier component along the shape of the seal surface. The carrier component defines an inner carrier region 41a and an outer carrier region 41b and has a plurality of defined depressions 42 extending in the inner carrier region on the seal surface, each of the depressions respectively defining a volume and a depth. The seal material is applied such that a profile is provided on the outer carrier region and a part of the seal material extends into a part of the depressions of the carrier component, the volume and/or the depth being filled at least halfway.SELECTED DRAWING: Figure 4
Inventors:
BRIAN FRANK
MARCO SANDECK
MICHAEL MODER
JUERGEN BESTEBNER
MARCO SANDECK
MICHAEL MODER
JUERGEN BESTEBNER
Application Number:
JP2018002405A
Publication Date:
October 11, 2018
Filing Date:
January 11, 2018
Export Citation:
Assignee:
VAT HOLDING AG
International Classes:
F16J15/52; C08J7/00; F16J15/12; F16K51/02
Domestic Patent References:
| JP2002081555A | 2002-03-22 | |||
| JP2016038099A | 2016-03-22 | |||
| JPH0622663U | 1994-03-25 | |||
| JP2005003181A | 2005-01-06 |
Foreign References:
| US20140175310A1 | 2014-06-26 |
Attorney, Agent or Firm:
Patent business corporation Tsukuni