PURPOSE: To provide a sealed type chamber to be employed for physical and/or chemical treatment and in which continuous treatment, e.g. discharge treatment and dry etching, can be carried out for an object for treatment by installing an opening and closing apparatus consisting of two pairs of upper and lower roller belts respectively in an insertion inlet and a discharge outlet of the chamber.
CONSTITUTION: When an object 2 for treatment moves on a roller toward the inside of a chamber 1 and reaches an insertion inlet of the chamber 1, two pairs of upper and lower roller conveyers 5, 5' rotate while corresponding to the movement of the object 2 for treatment and being closely attached to the object 2 for treatment. A plurality of rollers 6 to drive the roller conveyers 5, 5' are installed in the inside of the roller conveyers 5, 5' and at least one of the rollers 6 is provided with a spring mechanism 7 to constantly push the roller conveyer belts 5, 5' in the direction toward the position where the object 2 for treatment is positioned. Consequently, the gas in the chamber 1 is prevented from leaking outside at the time of insertion of the object 2 for treatment and air is prevented from entering the inside of the pressure-decreased chamber 1.
SHIMA YOSHINORI
OBA AKIRA
