To provide a sealing device for a treating device using a rotary table, surely shielding a treatment area where the rotary table is disposed from an area inside a cover where a driving system including a rotating shaft is disposed, and favorably performing treatment such as substrate washing requiring high-level no-contamination state without causing a problem in sealing.
This sealing device 4 is a non-contact type mechanical seal for shielding the treatment area A from the area B inside the cover, which includes: a rotary sealing ring 9 fixed to the rotary table 1; a static sealing ring 10 held on the cover 3 to be axially moved; a spring member 11 pressing and energizing the static sealing ring 10 to the rotary sealing ring 9; and a series of sealing gas passages 12a penetrating the cover 3 and the static sealing ring 10 to be opened between the sealing end faces 9a, 10a, wherein sealing gas G is jetted from the sealing gas passage 12a between the sealing end faces 9a, 10a to be kept in the non-contact state.
NINOMIYA MASANOBU
SHIMOZATO MITSURU
