Title:
SEALING MEMBER AND SEALING METHOD, TABLE AND STAGE DEVICE, AS WELL AS EXPOSURE DEVICE
Document Type and Number:
Japanese Patent JP2006200562
Kind Code:
A
Abstract:
To provide a sealing member and a sealing method for effectively preventing the flow of liquid from a predetermined gap and reducing the deformation of a member, a table and stage device each having the sealing member, as well as an exposure device with the stage device.
The sealing member 10 is provided for sealing a gap 14 between a member 12a and a member 12b. It comprises attracting parts 10a, 10b having flexibility for closely contacting the member 12a and the member 12b while forming seal spaces 16a, 16b therebetween. It is acceptable that only one of the attracting parts 10a, 10b is provided, as required.
Inventors:
YOSHIDA YUICHI
Application Number:
JP2005010091A
Publication Date:
August 03, 2006
Filing Date:
January 18, 2005
Export Citation:
Assignee:
NIKON CORP
International Classes:
F16J15/10; F16B47/00; G03F7/20; H01L21/027; H01L21/683
Domestic Patent References:
| JPH0943861A | 1997-02-14 | |||
| JPH07239284A | 1995-09-12 | |||
| JP2001291663A | 2001-10-19 | |||
| JP2001125275A | 2001-05-11 |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Masakazu Aoyama
Kazuya Nishi
Tadashi Takahashi
Masakazu Aoyama
Kazuya Nishi
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